Statistics for Controlled Fluxes of Silicon Nanoparticles to a Substrate in Pulsed Radio-Frequency Argon–Silane Plasmas
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Controlled Fluxes of Silicon Nanoparticles to a Substrate in Pulsed Radio-Frequency Argon–Silane Plasmas | 293 |
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Larriba-Andaluz_2016_controlled.pdf | 356 |
java.util.UUID:df7dc6a5-a192-4d56-b71f-4fa1037dd1d7 | 78 |
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