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Item AFM-Based Fabrication of Nanofluidic Device for Medical Application(Office of the Vice Chancellor for Research, 2014-04-11) Promyoo, Rapeepan; El-Mounayri, Hazim; Karingula, Varun KumarRecent developments in science and engineering have advanced the atomic manufacture of nanoscale structures, allowing for improved high-performance technologies. Among them, AFM-based nanomachining is considered a potential manufacturing tool for operations including machining, patterning, and assembling with in situ metrology and visualization. In this work, atomic force microscope (AFM) is employed in the fabrication of nanofluidic device for DNA stretching application. Nanofluidic channels with various depths and widths are fabricated using AFM indentation and scratching techniques. To introduce the fluid inside the nanochannels, microchannels are made on both sides of the nanochannels. Photolithography technique is used to fabricate microfluidic channels on silicon wafers. A 3D Molecular Dynamics (MD) model is used to guide the design and fabrication of nanodevices through nanoscratching. The correlation between the scratching conditions, including applied force, scratching depth, and distant between any two scratched grooves and the defect mechanism in the substrate/workpiece is investigated. The MD model allows proper process parameter identification resulting in more accurate nanochannel size.Item AFM-Based Nanofabrication: Modeling, Simulation, and Experimental Verification(Office of the Vice Chancellor for Research, 2013-04-05) Promyoo, Rapeepan; El-Mounayri, Hazim; Karingula, Varun Kumar; Varahramyan, KodyRecent developments in science and engineering have advanced the fabrication techniques for micro/ nanodevices. Among them, atomic force microscope (AFM) has already been used for nanomachining and fabrication of micro/nanodevices. In this paper, a computational model for AFM-based nanofabrication processes is being developed. Molecular Dynamics (MD) technique is used to model and simulate mechanical indentation and scratching at the nanoscale. The effects of AFM-tip radius and crystal orientation are investigated. The simulation is also used to study the effect of the AFM tip speed on the indentation force at the interface between the tip and the substrate/workpiece. The material deformation and indentation geometry are extracted from the final locations of atoms, which are displaced by the rigid indenter. Material properties including modulus of elasticity and hardness are estimated. It is found that properties vary significantly at the nanoscale. AFM is used to conduct actual nanoindentation and scratching, to validate the MD simulation. Qualitative agreement is found. Finally, AFM-based fabrication of nanochannels/nanofluidic devices is conducted using different applied forces, scratching length, and feed rate.